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SV Tech offers a comprehensive service to provide all customers in the semiconductor industry.
SV Tech is committed to provide quality surplus used equipment brokerage service,in terms of searching and buying used equipment in time and with economic cost in semiconductor industries.
SV Tech provides refurbishment for Tegal, LAM, AMAT P5000, Varian 3190/3290, DNS 60A,80A, 80B, SVG tracks.
SV Tech provides field service for DNS 60A, 80A, 80B, TEL Mark 5, Mark 7, Mark 8, SVG Tracks, TEGAL 901e, 903e, 915, 965, LAM 490, 590, 690, 4400, 4420, 4500, 4520, 9400, 9600, Novellus Concept One, Concept Two, Varian Sputter 3180, 3190, 3280, 3290.
SV Tech is devoted to providing spare parts for leading edge semiconductor manufacturing equipment such as DNS, TEL, SVG, AMAT, LAM, TEGAL, Fusion and other surplus spare parts as well.
SV Tech acquired distribution of Mask Aligner systems and Bench-top Spin Coater systems from MIDAS System Co. and Auto-control thickness measurement systems from K-Mac. Please contact us for more details.
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Mask Aligner: MDA-6000
MDA-8000
Spin Coater: Spin-1200D
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Thickness Measurement System: ST2000-DLXn
...ST4000-DLX
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Silicon Valley Tech
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SV Tech offers comprehensive service to provide confidence for both sellers and buyers. View our list of equipment below:
Etching:
Masking:
Diffusion/Thin Film:
Wet Process:
Metrology/Inspect:
Back-end Tool:
RF Generator:
Chiller:
Other/Fab Supply:
Wanted:
To Sell:
No. |
Manufacturer |
Description |
Model |
S/N |
Comment |
Pic |
Spec |
E107 |
Fusion |
UV Stablizer |
Fusion 150PC |
N/A |
6" |
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E112 |
Lam Research |
Oxide Etcher |
Auto-etcher 590 |
9070 |
4" |
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E126 |
Lam Research |
Oxide Etcher |
Rainbow 4520 |
3923 |
4" |
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E110 |
Lam Research |
Poly/Nitride Etcher |
Rainbow 4428 |
3145 |
8" |
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E111 |
Lam Research |
Oxide Etcher |
Auto-etcher 590 |
1801 |
4" |
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E102 |
Tegal |
Poly Etcher |
Tegal 803 |
8030302 |
YR 1985, 4" |
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E103 |
Tegal |
Oxide Etcher |
Tegal 903e |
N/A |
6" |
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E104 |
Tegal |
Poly/Nitride Etcher |
Tegal 901e |
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4" |
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E105 |
Tegal |
Metal Etcher |
Tegal T1612 |
11436 |
5" |
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E106 |
Tegal |
Asher |
Tegal 915 |
087 |
6" |
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No. |
Manufacturer |
Description |
Model |
S/N |
Comment |
Pic |
Spec |
M201 |
Codonics |
Printer |
VP-95 II |
N/A |
For Nikon Stepper |
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M210 |
DNS |
DNS 60A |
SKW-60A-AVP |
91700-6210 |
1 Coat & 1 Developer |
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M211 |
DNS |
Transformer |
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for 60A, 80A/B, working condition |
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M212 |
DNS |
EEW Assy. Unit for 80A |
EEW |
N/A |
1997, 3 ea available |
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M213 |
DNS |
SSC-60A |
scrubber unit |
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60A, part machine |
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M214 |
DNS |
Temp & Humidity Controller |
60A, 80A |
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M722 |
Now Technologies |
400ml Resist Reservoir w/ level monitor |
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Used |
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M208 |
Semix |
SOG |
TR6132U |
691148 |
4" |
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M206 |
SVG |
1 Gal. Jar for drain |
SVG |
N/A |
50 ea brand new |
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M202 |
Ultra Tech |
Ultra Tech Stepper 1500 |
UT 1500 |
448 |
6" |
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M204 |
Ultra Tech |
Stepper |
UT 1000WF |
394 |
6" |
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M203 |
YES |
Image Reverse Oven |
YES-10 |
88562 |
operational |
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M720 |
Milipore |
Controller |
WCDS |
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Used |
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Diffusion/Thin Film
No. |
Manufacturer |
Description |
Model |
S/N |
Comment |
Pic |
Spec |
D305 |
CHA |
Vacuum Evaporator |
SE-600-RAP |
838-1 |
4",6" Planetary |
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D302 |
Eaton |
High current |
NV-GSD-80 |
08600029G |
6"YR1994(SEN Style Endstation) |
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D303 |
Omega |
X-Y Recorder |
595 |
221059 |
For Implant Tool |
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D307 |
Novellus |
PECVD |
C-1 |
96-48-2196 |
6", 1996 |
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D304 |
Varian |
Turbo-V70LP Valve |
V70LP/MKS |
N/A |
P/N: 415591-C1 |
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D721 |
MKS |
Controller |
250B |
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used |
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D723 |
SGL Carborn |
susceptor, 6" for Epi |
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N/A |
N/A |
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D728 |
TEL |
Furnace Remote Control Pad |
GP230-LG II-HT |
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Handy Communication Terminal,DC24V/12W |
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No. |
Manufacturer |
Description |
Model |
S/N |
Comment |
Pic |
Spec |
F404 |
MTS System |
Diffusion Tube Cleaning Sink |
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1010 |
Size:120"WX57"XDX88"H Vintage 03/2006 |
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F403 |
Modutek |
Wafer Cleaning Sink w/ Dump Rinser |
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Chemical Bath Size:10"X10"X10" Sink Size:37"X24"X72"H |
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F402 |
Semitool |
Single Rinse/Dryer w/ TC20, 328 controller |
ST260D |
C8249 |
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F405 |
Semitool |
Solvent Cleaner |
WST 406 MG |
44671/5165 |
4", with chemcial cabinet |
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No. |
Manufacturer |
Description |
Model |
S/N |
Comment |
Pic |
Spec |
S501 |
AG Associate |
Heat Pulse |
210/M |
F82016 |
4" Operational |
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S503 |
KLA/Tencor |
Alpha Step 200 |
AS-200 |
0590-1857 |
Up to 6" |
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S504 |
Nanometrics |
Thickness measurement |
010-0180 |
1280-0924 |
SOLD |
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S508 |
Nanometrics |
Nanospec 200 Thickness Measurement |
AFT 200 |
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6" |
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S506 |
Rudolph |
Ellipsometer |
EL III 2C & 5C |
7796 |
6" |
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S512 |
Rudolph |
Ellipsometer |
FE III |
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4" to 8" |
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No. |
Manufacturer |
Description |
Model |
S/N |
Comment |
Pic |
Spec |
B602 |
Electroglas |
Prober |
2001X |
WP85031424-115268 |
4" |
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No. |
Manufacturer |
Description |
Model |
S/N |
Comment |
Pic |
Spec |
R747 |
AE |
RF Generator,LDM |
PDX2500 |
121947 |
Brand New, 55KHz |
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R751 |
AE |
RF Generator |
PDW 2200W |
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LAM #853-015516R002 |
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R707 |
ENI |
RF Generator |
OEM-6AM-1B-21251 |
5022 |
Vintage:4/93 Refurbished |
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R708 |
ENI |
RF Generator |
OEM-12A |
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Operational |
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R746 |
ENI |
Controllable ENI RF Generator |
AP 400B |
105 |
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R750 |
ENI |
Low Frequency Generator |
Plasmaloc 2-HF |
2099 |
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No. |
Manufacturer |
Description |
Model |
S/N |
Comment |
Pic |
Spec |
C738 |
Accurate Gas Control |
Temperature controller for Tegal |
354C |
3290 |
Used |
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C735 |
Neslab |
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Merlin M33 |
100241029 |
SOLD |
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C736 |
Neslab |
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CFT75 |
199216018 |
DP1, 60Hz/1/200-230 |
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C737 |
Neslab |
Chiller |
FTC-350 |
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115V/60Hz,R134A |
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C749 |
M and W Sytems |
Flowrite Recirculating Cooling System |
RPCX1ZA-DRY |
855 22 9 11 |
2 ea, opertional |
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C748 |
Tek-Temp Inc. |
Cooling Unit |
TKD 100 |
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operational |
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C734 |
VWR System |
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1170 |
414555 |
Used |
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C739 |
Poly Science |
Chiller |
1496E |
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Used |
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C706 |
Tegal Chiller |
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Used |
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No. |
Manufacturer |
Description |
Model |
S/N |
Comment |
Pic |
Spec |
F703 |
AZ Electronic Guardian |
TC1000 |
00080 |
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F705 |
Ecosys |
Guardian Burn Box |
Remote M |
RM5057 |
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F701 |
EMPAK |
Mask Holder for MPA |
B80-60-01A |
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12ea,6" used one for B80-60P-12 |
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F745 |
Entegris |
Mask Holder |
H92-6025PL |
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F716 |
Entegris |
6" Mask Holder, 250 Thk Bayon |
H92-6025-108-5413 |
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Brand New |
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F717 |
Fluoroware |
Mask Holder |
H92-6001PW |
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20 ea, Brand new |
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F718 |
Fluoroware |
Teflon Cassettes, 6" |
A182-60MB |
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F719 |
Fluoroware |
Teflon Cassettes, 6" |
A194-60MB |
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Used |
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F712 |
H-Square |
Wafer Transfer |
WT6H |
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6", Used, 3ea |
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F731 |
H-Square |
4" Metal Cassetts |
MC-4-P or MC-4 |
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F732 |
H-Square |
6" Metal Cassetts |
SQ22766-X |
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New 1qty |
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F733 |
H-Square |
6" Metal Cassetts |
285-8HC |
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Used 2qty |
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F744 |
H Square |
Metal Cassette |
R-E |
4" |
25qty |
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F713 |
Instruments |
Chart Recorder |
156 |
F0045 |
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F711 |
Sony Video |
Graphic Printer |
UP-850 |
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F729 |
Terra Universial |
Vibration Isolation Table |
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57"Lx30"Wx31"H |
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F726 |
Tektronix |
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T935A |
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35MHz Oscilloscope |
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F727 |
Tektronix |
Dual beam osciloscope |
7844 |
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F800 |
Adda Corp |
DC brushless fan |
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brand new, 48V DC |
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F801 |
UniPower |
Power supply |
TMH7000 |
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p/n: 001-3267-070 |
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F802 |
UniPower |
Power Supply |
TPCH29300-278 |
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p/n: 001-3718-0000 |
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F803 |
Martek Power |
Power Supply |
P52279 |
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100-200Vac in, 48V@10.5A out |
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