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SV Tech offers a comprehensive service to provide all customers in the semiconductor industry.
SV Tech provides spare parts, surplus used equipment brokerage, refurbish, field service
DNS 60A, 80A, 80B, TEL Mark 5, Mark 7,
Mark 8, SVG Tracks, TEGAL 901e, 903e, 915,
965, LAM 4400, 4420, 4500, 4520, 9600,
Novellus Concept One, Concept Two, Varian-
Sputter 3180, 3190, 3280, 3290,
Eaton Implant, and semiconductor equipment
related new products.
SV Tech is committed to provide quality service,
in terms of searching and buying used equipment
in time and with economic cost in semiconductor industries.
SV Tech is devoted to providing spare parts for leading edge semiconductor manufacturing equipment such as DNS, TEL, SVG, AMAT, LAM, TEGAL, Fusion and other surplus spare parts as well.
SV Tech acquired distribution of Mask Aligner systems and Bench-top Spin Coater systems from MIDAS System Co. and Auto-control thickness measurement systems from K-Mac. Please contact us for more details.
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Mask Aligner: MDA-6000
MDA-8000
Spin Coater: Spin-1200D
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Thickness Measurement System: ST2000-DLXn
...ST4000-DLX
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Silicon Valley Tech
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SV Tech offers comprehensive service to provide confidence for both sellers and buyers. View our list of equipment below:
Etching:
Masking:
Diffusion/Implant:
Front-end Common Tool:
Metrology/Inspect:
Back-end Tool:
Other/Fab Supply:
Wanted:
To Sell:
No. |
Manufacturer |
Description |
Model |
S/N |
Comment |
Pic |
Spec |
E108 |
DNS |
Spray Etcher |
SPW 612 |
54530-0072 |
SOLD |
 |
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E107 |
Fusion |
UV Stablizer |
Fusion 150PC |
N/A |
6" |
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E112 |
Lam Research |
Oxide Etcher |
Auto-etcher 590 |
9070 |
4" |
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E109 |
Lam Research |
Oxide Etcher |
Rainbow 4520 |
3923 |
4" |
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E110 |
Lam Research |
Poly/Nitride Etcher |
Rainbow 4428 |
3145 |
8" |
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E111 |
Lam Research |
Oxide Etcher |
Auto-etcher 590 |
1801 |
4" |
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E101 |
Semitool |
Solvent Cleaner |
WST 406 MG |
44671/5165 |
4", with chemcial cabinet |
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E102 |
Tegal |
Poly Etcher |
Tegal 803 |
8030302 |
YR 1985, 4" |
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E103 |
Tegal |
Oxide Etcher |
Tegal 903e |
11486 |
6" |
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E104 |
Tegal |
Poly/Nitride Etcher |
Tegal 901e |
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4" |
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E105 |
Tegal |
Metal Etcher |
Tegal T1612 |
11436 |
5" |
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E106 |
Tegal |
Asher |
Tegal 915 |
087 |
6" |
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No. |
Manufacturer |
Description |
Model |
S/N |
Comment |
Pic |
Spec |
M201 |
Codonics |
Printer |
VP-95 II |
N/A |
For Nikon Stepper |
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R722 |
Now Technologies |
400ml Resist Reservoir w/ level monitor |
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Used |
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M208 |
Semix |
SOG |
TR6132U |
691148 |
4" |
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M206 |
SVG |
1 Coater 1 Developer |
SVG 8626/8636 |
N/A |
SOLD |
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M202 |
Ultra Tech |
Ultra Tech Stepper 1500 |
UT 1500 |
448 |
6" |
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M204 |
Ultra Tech |
Stepper |
UT 1000WF |
394 |
6" |
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M203 |
YES |
Image Reverse Oven |
YES-10 |
88562 |
W/Pascal 2010 SD Pump |
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Diffusion/Thin Film
No. |
Manufacturer |
Description |
Model |
S/N |
Comment |
Pic |
Spec |
D305 |
CHA |
Vacuum Evaporator |
SE-600-RAP |
838-1 |
4",6" Planetary |
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D302 |
Eaton |
High current |
NV-GSD-80 |
08600029G |
6"YR1994(SEN Style Endstation) |
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D303 |
Omega |
X-Y Recorder |
595 |
221059 |
For Implant Tool |
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D306 |
Thermco, Mini Brute |
Furnace |
MB-81 |
A0112 |
6" |
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D304 |
Varian |
Turbo-V70LP Valve |
V70LP/MKS |
N/A |
P/N: 415591-C1 |
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No. |
Manufacturer |
Description |
Model |
S/N |
Comment |
Pic |
Spec |
F404 |
MTS System |
Diffusion Tube Cleaning Sink |
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1010 |
Size:120"WX57"XDX88"H Vintage 03/2006 |
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F403 |
Modutek |
Wafer Cleaning Sink w/ Dump Rinser |
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Chemical Bath Size:10"X10"X10" Sink Size:37"X24"X72"H |
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F402 |
Semitool |
Single Rinse/Dryer w/ TC20, 328 controller |
ST260D |
C8249 |
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No. |
Manufacturer |
Description |
Model |
S/N |
Comment |
Pic |
Spec |
S501 |
AG Associate |
Heat Pulse |
210/M |
F82016 |
4" Operational |
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S503 |
KLA/Tencor |
Alpha Step 200 |
AS-200 |
0590-1857 |
Up to 6" |
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S504 |
Nanometrics |
Thickness measurement |
010-0180 |
1280-0924 |
4" |
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S508 |
Nanometrics |
Nanospec 200 Thickness Measurement |
AFT 200 |
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6" |
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S511 |
Phase Shift Technology |
Surface Mapping Microscope |
Micro Xam-SWHR |
7965 |
with Video Cam |
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S513 |
Prometrix |
Film Thickness Mapping System |
FT-650 |
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Operational |
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S506 |
Rudolph |
Ellipsometer |
EL III 2C & 5C |
7796 |
6" |
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S512 |
Rudolph |
Ellipsometer |
FE III |
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4" to 8" |
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No. |
Manufacturer |
Description |
Model |
S/N |
Comment |
Pic |
Spec |
B601 |
Electroglas |
Prober |
2001X |
RWP00063016-31963 |
SOLD |
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B602 |
Electroglas |
Prober |
2001X |
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No. |
Manufacturer |
Description |
Model |
S/N |
Comment |
Pic |
Spec |
R747 |
AE |
RF Generator,LDM |
PDX2500 |
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Brand New, 55KHz |
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R738 |
Accurate Gas Control |
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354C |
3290 |
Used |
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R703 |
AZ Electronic Guardian |
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TC1000 |
00080 |
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R704 |
Black Ray |
Ultraviolet Lamp |
B-100Y |
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R743 |
DNS |
Temp & Humidity Controller |
80A |
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R742 |
DNS |
Transformer |
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for 60A, 80A/B, working condition |
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R705 |
Ecosys |
Guardian Burn Box |
Remote M |
RM5057 |
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R701 |
EMPAK |
Mask Holder for MPA |
B80-60-01A |
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12ea,6" used one for B80-60P-12 |
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R746 |
ENI |
Controllable ENI RF Generator |
AP 400B |
105 |
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R750 |
ENI |
Low Frequency Generator |
Plasmaloc 2-HF |
2099 |
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R707 |
ENI |
RF Generator |
OEM-6AM-1B-21251 |
5022 |
Vintage:4/93 Refurbished |
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R708 |
ENI |
RF Generator |
OEM-12A |
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Operational |
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R709 |
ENI |
RF Generator |
OEM-25XL |
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SOLD |
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R710 |
ENI |
RF Generator |
HF-1 |
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Used,2Qty |
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R745 |
Entegris |
Mask Holder |
H92-6025PL |
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R716 |
Entegris |
6" Mask Holder, 250 Thk Bayon |
H92-6025-108-5413 |
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Brand New |
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R717 |
Fluoroware |
Mask Holder |
H92-6001PW |
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20 ea, Brand new |
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R718 |
Fluoroware |
Teflon Cassettes, 6" |
A182-60MB |
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R719 |
Fluoroware |
Teflon Cassettes, 6" |
A194-60MB |
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Used |
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R712 |
H-Square |
Wafer Transfer |
WT6H |
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6", Used, 3ea |
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R731 |
H-Square |
4" Metal Cassetts |
MC-4-P |
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R732 |
H-Square |
6" Metal Cassetts |
SQ22766-X |
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New 1qty |
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R733 |
H-Square |
6" Metal Cassetts |
285-8HC |
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Used 2qty |
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R744 |
H Square |
Metal Cassette |
H Square R-E |
4" |
25qty |
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R713 |
Instruments |
Chart Recorder |
156 |
F0045 |
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R720 |
Milipore |
Controller |
WCDS |
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Used |
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R721 |
MKS |
Controller |
250B |
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used |
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R749 |
M and W Sytems |
Flowrite Recirculating Cooling System |
RPCX1ZA-DRY |
855 22 9 11 |
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R735 |
Neslab |
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Merlin M33 |
100241029 |
SOLD |
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R736 |
Neslab |
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CFT75 |
199216018 |
Used |
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R737 |
Neslab |
Chiller |
FTC-350 |
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115V/60Hz,R134A |
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R722 |
Now Technologies |
400ml Resist Reservoir w/ level monitor |
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Used |
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R739 |
Poly Science |
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1496E |
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Used |
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R723 |
SGL Carborn |
susceptor, 6" for Epi |
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Brand New |
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R711 |
Sony Video |
Graphic Printer |
UP-850 |
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R706 |
Tegal Chiller |
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Used |
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R748 |
Tek-Temp Inc. |
Cooling Unit |
TKD 100 |
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R726 |
Tektronix |
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T935A |
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35MHz Oscilloscope |
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R727 |
Tektronix |
Dual beam osciloscope |
7844 |
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R728 |
TEL |
Furnace Remote Control Pad |
GP230-LG II-HT |
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Handy Communication Terminal,DC24V/12W |
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R729 |
Terra Universial |
Vibration Isolation Table |
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57"Lx30"Wx31"H |
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R734 |
VWR System |
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1170 |
414555 |
Used |
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R730 |
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4" Metal Cassetts |
MC-4 |
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