Manufacture : Rudolph

Model : FE III

Desc : 

Rudolph Research FE-III Focus Ellipsometer 
- Fully automated high speed focused beam ellipsometer 
  for simultaneous multi-angle measurements 

- Fully automated 3-axis robot wafer handling 
  with random access to three cassette 4" to 8" capable. 

- Light source: 633nm HeNe laser, 

- 780nm laser diode Spot Size 12x24um, 

- Test site: de-skew only 125um, 
  site by site 50um Color-corrected optics, 

- Auto focus, 

- Field of view: low mag 7 x 9mm / high mag 0.9 x 1.2mm 
  Optional pattern recognition 

- Edge or gray scale detection 

- Manual or auto de-skew re-tech

- Pre-aligner: flat notch finder, 
  x / y centering + or - 50um, 
  theta + or - 0.1, 
  de-skew + or - 5um

- Stage accuracy: 7um over 200mm