Maker : DNS

Model : SKW-60A-AVP

Description : 1 Coat & 1 Developer

S/N: 91700-6210

Vintage: June 1992

Wafer Size : 6"

Power Code : 200 VAC, 200A

Status : Decontaminated, Operational

Sub-systems : 1. Chemical cabinet
              

Spec.: 

1. Foot Print : 42"D X 73"W X 67"H
2. 2HMDS, 4HP, 2CP, 1 AH, 1AC
3. Wafer Flow : Left to Right