Manufacture : Electroglas


Model: EG 2001X

Probe station S/N: WP85031424-115268
    Wafer Size :  100 mm
    Microscope: Bausch & Lomb, 1x to 7x w/transformer
    Shutter controller
    joystic contorller
    Auto load and unload : batch to batch
    monitor: Sanyo B/W video monitor VM-5609, s/n: 7150357
    Auto Align Controller: Vision Module PRM-2 EG2.
                           S/N: VM90091211-140125
    Power controller: PPC S/N: WP93031547-150734
    CCD camera system.
    Temp Controller for Hot Chuck: up to 120 C
          Model TC2000 
          Manufacture: Electroglas.

Process Monitor workstation: 
    Model:YIELDSTATION S900
    Manufacture: Keithley
    Soft ware: Testsoft version 5.7 NF S005F
    17"monitor
    workstation w/keybord

Status: as-is operational

Dimensions: 48¡±x32¡±x66¡±H for main, 
            20¡±x30¡±x20¡±H for Keithly.