Manufacture : Prometrix

Model : FT-650

Measures single or multiple layers or oxide, nitride, photoresist, 
polysilican and other optical transparent films.

Measurement capabilities from 100 angstom to greater that 4 microns.

Analysis capabilities: Mapping: Die, Contour, 3-D maps.

Cassette to cassette wafer handling.

Measurement: Film thickness, reflexivity.

Spot sizes: 4um to 80um.

Number of layers: Up to 3.

Standard wafer sizes: 3, 3.25" and 100, 125, 150, 200mm. 
                      currently set up 200 mm