Manufacture : Eaton NOVA-GSD 80

     Model : NOVA-GSD 80



     This system is refurbished and upgraded by OEM in 2001.
     After refurbishing, didn't use not much (low mileage on the tool 
     and great condition).

     Machine type: High current

     Power: 208V, 60Hz

     Sun service monitor

     Software version: Sun system 2.5.4B

     End station: Same as GSD 200 series

     Wafer handling: Same as GSD 200 series

     Backup tool: 8mm tape drive

     Programmable tilt angle: +/- 0~11 degree

     Dose range: 1.0 e 11~16

     Energy level: 0~80 KeV

     Source type: ELS 

     Vaporizer: YES

     Shower type:E-shower

     Chiller: Neslab

     V. Pumps: Dry pumps (edward/Ebara)

     Turbo pump: Seiko seki H 2000C

     Cryo pump: CTI(8"/10")

     Cryo compressors: CTI 8300/8500

     Disc cart: YES

     Class ULPA filtered work area, 20" color graphic light pen screen, 

     Sun sparc5 workstation 480MB HD, SECS II interface, 
    
     18 wafer process disk.......ETC