Manufacturer: LAM Research 
Model: Rainbow 4520 
Serial: 3923

- 4"/100mm 
- Envision software 
- Through-the-wall 
- Orbital Gas Box
- RF cart with PDW 2200 AE RF generator
- Dual Verity EP200Mmd Endpoint detection. 
- Remote operator interface, circuit breaker style onboard AC dist.
- Dual channel LAM chiller included : LAM 2080 TCU
- 208V 3 phase 30A power.