Nano Spec 180 Spec.


Standard films measured silicon dioxide and nitride, 
negative and positive resists, nitrides, oxides, and polyimides

- Measures from 400A to 40,000A

- Measures in the 480-790 nm wavelength range 

- Stage allows up to 4"/100mm wafers 

- 10x eyepieces 

- 10x, 20x, and 40x objectives




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