Model : UT 1500

S/N: 448

Vintage: Dec. 1987

Wafer Size: 6"

Controller: HP 362HP Computer with Keyborad & monitor
Printer: Epson LX-300
         80 Column Printer (S/N: 667A60009)

Resolution : Ran 1u devices implanter layer at Analog Device 
HP-HIL ID Module HP 46084A
New upgrade exposure shutter
Electronic Focus