Manufacture : Ultra Tech

Model : UT Stepper 1000 WF

S/N : 394

Wafer size : current for 6"

Resolution : 1.25um

Vintage : 2001


HP 226 computer / Okidata Microline 184 Turbo printer
Latest System software ; Sop 1004 C.4.1 Rev.B
Intelligent Autoloader to Minimize wafer flat error, 
easy control belt speed / direction
Lamp PS HA-UPR 5000C
Light Tower